Micro-Transfer Printing on Silicon Photonics: Tutorial, Recent Progress and Outlook

By Ye Chen et al.
Ghent University, imec

Abstract

This paper highlights micro-transfer printing (MTP) as a promising scalable approach to heterogeneous integration for silicon photonics. MTP uniquely achieves high integration density, high throughput, and high material efficiency through a low-temperature, back-end integration process. Current demonstrations, including integrated III-V lasers and thin-film electro-optic modulators, confirm MTP's potential. Industrial adoption requires resolving challenges related to final integration yield and throughput, device reliability, and supply chain maturity.

Index Terms — Silicon Photonics, Heterogeneous Integration, Micro-Transfer Printing

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