Self-Attention to Operator Learning-based 3D-IC Thermal Simulation
By Zhen Huang 1,2, Hong Wang 1, Wenkai Yang 3,5, Muxi Tang 4, Depeng Xie 5, Ting-Jung Lin 2, Yu Zhang 1, Wei W. Xing 6, Lei He 2,7
1 School of Computer Science and Technology, University of Science and Technology of China, Hefei, China
2 Ningbo Institute of Digital Twin, Eastern Institute of Technology, Ningbo, China
3 ShanghaiTech University, Shanghai, China 4 Tsinghua University, Beijing, China
5 BTDTechnology, Ningbo, China 6 University of Sheffield, Sheffield, UK
7 University of California, Los Angeles, USA

Abstract
Thermal management in 3D ICs is increasingly challenging due to higher power densities. Traditional PDE-solving-based methods, while accurate, are too slow for iterative design. Machine learning approaches like FNO provide faster alternatives but suffer from high-frequency information loss and high-fidelity data dependency. We introduce Self-Attention U-Net Fourier Neural Operator (SAU-FNO), a novel framework combining self-attention and U-Net with FNO to capture long-range dependencies and model local high-frequency features effectively. Transfer learning is employed to fine-tune low-fidelity data, minimizing the need for extensive high-fidelity datasets and speeding up training. Experiments demonstrate that SAU-FNO achieves state-of-the-art thermal prediction accuracy and provides an 842x speedup over traditional FEM methods, making it an efficient tool for advanced 3D IC thermal simulations.
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