Material Needs and Measurement Challenges for Advanced Semiconductor Packaging: Understanding the Soft Side of Science

By Ran Tao ^1,2, Polette Centellas ¹, Stian Romberg ¹, Anthony Kotula ¹, Gale Holmes ¹, Amanda Forster ¹, 
Christopher Soles ¹, Robert Allen ³, Edvin Cetegen ⁴, William Chen ⁵, Jeffrey Gotro ⁶, and Mark Poliksc ^7
1 National Institute of Standards and Technology, Gaithersburg
² North Carolina State University, Raleigh
³ National Renewable Energy Laboratory, Golden
⁴ Intel Corporation, Chandler
⁵ Advanced Semiconductor Engineering, Inc., Sunnyvale
⁶ Innocentrix, LLC, Rancho Santa Margarita
⁷ Binghamton University, Binghamton

Abstract

This Perspective builds upon insights from the National Institute of Standards and Technology (NIST) organized workshop, “Materials and Metrology Needs for Advanced Semiconductor Packaging Strategies,” held at the 35th annual Electronics Packaging Symposium in Binghamton, NY, on September 5, 2024. It outlines critical challenges and opportunities related to polymer-based “soft” materials in advanced semiconductor packaging, with emphasis on polymer science, measurement science (metrology), and the strategic development of Research-Grade Test Materials (RGTMs). These efforts, led by the NIST CHIPS team, aim to advance the fundamental understanding of structure–property–processing relationships, promote standardized guidelines and innovative methods for material characterization, and accelerate the development, qualification, and adoption of next-generation packaging materials. The Perspective also distills key insights from the panel discussion with industry experts, emphasizing the need for close collaboration among materials scientists, process engineers, and metrology experts to enable a holistic strategy, further highlighting the importance of cross-sector partnerships among industry, academia, and government to address pressing challenges in packaging materials and processes. Index

Terms— Advanced semiconductor packaging, cure kinetics, heterogeneous integration (HI), metrology, moisture